IC-100 heavy ion cyclic implanter was designed at the FLNR JINR in 1985 for acceleration of ions from carbon(12C+2) to argon (40Ar+7) with fixed energy of 1.2 MeV/nucl at HF system forth harmonic and of 0.6 MeV/nucl at HF sixth harmonic. 
Special-purpose beam transportation line with polymer film irradiation unit has been created as well as a box for heavy ion beam research. Two-plane beam scan system was installed in the extracted beam transportation line [7] so that to implant ions uniformly over a 600×200 mm target.PIG ion source was used at the accelerator to determine the accelerated ion mass range. Years 2003-2005 update resulted in IC-100 being equipped with external axial beam injection system and superconducting ECR ion source which allowed to produce intensive beams of highly charged ions of xenon, iodine, krypton, argon and other heavy elements of the Periodic Table. Helix inflector is installed in the center of the accelerator.


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    Parameter Realized in operation
    Accelerated ions 22Ne+4 40Ar+7
    56Fe+10 86Kr+15
    127I+22 132Xe+23
    182W+32 184W+31
    Range of accelerated ions A/Z = 5.545.95
    Acceleration harmonic 4
    Ion energy 0.9 ÷ 1.1 MeV/nucl
    Average magnetic field 1.7841.93 T
    HF frequency 19.8 ÷ 20.6 МГц
    Injection energy 14 ÷ 15 kV
    Injection line vacuum 1.5·10-7 Torr
    Cyclotron operating vacuum 5·10-8 Torr
    Dee voltage 45455 kV
    Efficiency of injection line beam transportation
    after separation
    ECR ion source beam emittance after separation
    and collimation in analyzing magnet
    ~ 250 π mm·mrad (estimate)
    (4 RMS)
    Injection line acceptance ~ 220 mm·mrad (estimate)
    Accelerated and extracted 86Kr+15 beam intensity 1.4·1012 particles/sec
    (3.5 mcA)
    Accelerated and extracted 132Xe+23 beam intensity ~ 1012 particles/sec
    Uniformity of track membrane pore density ± 10%
    Long-term stability of extracted beam current ±10415%
    Uniformity of hole density after the multiple film passage < ± 5%

IC-100 cyclotron was designed to accelerate multicharged ions with A/Z = 5.3 ÷ 6.0, which imposes rigorous criterions on production of intensive beams of highly charged ions of heavy elements. For this purpose the FLNR in cooperation with the LHE research scientists developed superconductive ECR ion source of about 3 T axial field level and 18 GHz SHF heating frequency [3,4]. After the injected beam separation and collimation on a diaphragm 20 mm in diameter 86Kr+15 ion beam current amounts to 60-70 microampere and 132Xe+23 ion beam current comes to 35 microampere.


    Element Ion A/Z FHF MHZ Target beam current in the experiments Maximum beam current
    Neon 22Ne+4 5.5 20.160 0.7 microampere  
    Argon 40Ar+7 5.714 20.200 2.5 microampere  
    Iron 56Fe+10 5.6 20.240 0.5 microampere  
    Krypton 86Kr+15 5.733 20.200 3.5 microampere 3.5 microampere
    Iodine 127I+22 5.773 20.200 0.25 microampere  
    Xenon 132Xe+23 5.739 20.180 3.7 microampere 3.7 microampere
    Xenon 132Xe+24 5.5 20.180 0.6 microampere  
    Tungsten 182W+32 5.6875 20.142 0.015 microampere 0.015 microampere
    Tungsten 184W+31 5.9355 20.142 0.035 microampere 0.035 microampere
    Tungsten 184W+32 5.75 20.142 0.017 microampere 0.017 microampere